ChemInform Abstract: SELECTIVE OXIDATION OF SILICON IN HIGH...

Chemischer Informationsdienst 1979 / 02 Vol. 10; Iss. 9

ChemInform Abstract: SELECTIVE OXIDATION OF SILICON IN HIGH PRESSURE STEAM

MIYOSHI, H., TSUBOUCHI, N., NISHIMOTO, A.
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Volume:
10
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.197909037
Date:
February, 1979
File:
PDF, 140 KB
1979
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