ChemInform Abstract: THERMAL NITRIDATION OF SILICON IN AMMONIA GAS: COMPOSITION AND OXIDATION RESISTANCE OF THE RESULTING FILMS
MURARKA, S. P., CHANG, C. C., ADAMS, A. C.Volume:
10
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.197942034
Date:
October, 1979
File:
PDF, 134 KB
1979