ChemInform Abstract: GREG: A NEW HOTWALL-CLOSE-SPACED VAPOR...

ChemInform Abstract: GREG: A NEW HOTWALL-CLOSE-SPACED VAPOR TRANSPORT DEPOSITION SYSTEM

MENEZES, C., FORTMANN, C., CASEY, S.
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Volume:
16
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.198537338
Date:
September, 1985
File:
PDF, 116 KB
1985
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