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[IEEE 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Moltrasio (2018.3.26-2018.3.29)] 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Resonance frequency control and digital correction for capacitive MEMS gyroscopes within electromechanical bandpass delta-sigma-modulators
Maurer, Michael, Rombach, Stefan, Manoli, YiannosYear:
2018
Language:
english
DOI:
10.1109/ISISS.2018.8358124
File:
PDF, 218 KB
english, 2018