Resonant Acoustic MEMS Wake-Up Switch
Bernstein, Jonathan J., Bancu, Mirela G., Cook, Eugene H., Duwel, Amy E., Elliott, Richard D., Gauthier, Douglas A., Golmon, Stephanie L., LeBlanc, John J., Tomaino-Iannucci, Michael J., Ung, JonathanYear:
2018
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2018.2830322
File:
PDF, 5.23 MB
english, 2018