Direct soft imprint of chalcogenide glasses

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 05 Vol. 36; Iss. 3

Direct soft imprint of chalcogenide glasses

Yehuda, Dor, Kassis, Eviatar, Joseph, Shay, Schvartzman, Mark
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5023173
Date:
May, 2018
File:
PDF, 1.70 MB
english, 2018
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