Damage-free polymer surface modification employing...

Japanese Journal of Applied Physics 2017 / 08 Vol. 56; Iss. 8

Damage-free polymer surface modification employing inward-type plasma

Kanou, Ryo, Suga, Hiroshi, Utsumi, Hideyuki, Takahashi, Satoshi, Shirayama, Yuya, Watanabe, Norimichi, Petit, Stèphane, Shimizu, Tetsuo
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.086201
Date:
August, 2017
File:
PDF, 1.67 MB
english, 2017
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