Robust control and data-driven tuning of a hybrid...

International Journal of Adaptive Control and Signal Processing 2018 / 05

Robust control and data-driven tuning of a hybrid integrator-gain system with applications to wafer scanners

Heertjes, M.F., Irigoyen Perdiguero, N., Deenen, D.A.
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Language:
english
Journal:
International Journal of Adaptive Control and Signal Processing
DOI:
10.1002/acs.2888
Date:
May, 2018
File:
PDF, 1.13 MB
english, 2018
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