Impact of ion energies in Ar/H 2 capacitively coupled radio frequency discharges on PEALD processes of titanium films
Iwashita, Shinya, Denpoh, Kazuki, Kikuchi, Takamichi, Suzuki, Yusuke, Wagatsuma, Yuichiro, Hasegawa, Toshio, Moriya, TsuyoshiLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2018.02.068
Date:
February, 2018
File:
PDF, 602 KB
english, 2018