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Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO)
Mitschker, F, Schücke, L, Hoppe, Ch, Jaritz, M, Dahlmann, R, de los Arcos, T, Hopmann, Ch, Grundmeier, G, Awakowicz, PVolume:
51
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aac0ab
Date:
June, 2018
File:
PDF, 3.63 MB
english, 2018