[IEEE 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Moltrasio (2018.3.26-2018.3.29)] 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - A micro thermal and stress isolation platform for inertial sensors
Yang, Donguk Max, Najafi, Khalil, Lemmerhirt, David F., Mitchell, JayYear:
2018
DOI:
10.1109/ISISS.2018.8358149
File:
PDF, 1006 KB
2018