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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Resonators for real-time clocks based on epitaxial polysilicon process: A feasibility study on system-level compensation of temperature drifts
Mussi, Giorgio, Bestetti, Marco, Zega, Valentina, Frangi, Attilio, Gattere, Gabriele, Langfelder, GiacomoYear:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346654
File:
PDF, 628 KB
english, 2018