Effect of adding an insulator between metal and...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 05 Vol. 36; Iss. 3

Effect of adding an insulator between metal and semiconductor layers on contact resistance

Kim, Hyunjung, Jang, Woochool, Lim, Heewoo, Kweon, Youngkyun, Bang, Minwook, Kwon, Saejin, Kim, Bumsik, Cho, Haewon, Jeon, Hyeongtag
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5020310
Date:
May, 2018
File:
PDF, 988 KB
english, 2018
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