Standard pressure deposition of crack-free AlN buffer layer...

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Superlattices and Microstructures 2018 / 5

Standard pressure deposition of crack-free AlN buffer layer grown on c-plane sapphire by PALE technique via MOCVD

Abd Rahman, Mohd Nazri, Shuhaimi, Ahmad, Yusuf, Yusnizam, Li, Hongjian, Sulaiman, Abdullah Fadil, Alif Samsudin, Muhammad Esmed, Zainal, Norzaini, Abdul Khudus, Muhammad I.M.
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Language:
english
Journal:
Superlattices and Microstructures
DOI:
10.1016/j.spmi.2018.05.024
Date:
May, 2018
File:
PDF, 926 KB
english, 2018
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