Determination of thicknesses and temperatures of...

Journal of Applied Physics 2018 / 05 Vol. 123; Iss. 18

Determination of thicknesses and temperatures of crystalline silicon wafers from optical measurements in the far infrared region

Franta, Daniel, Franta, Pavel, Vohánka, Jiří, Čermák, Martin, Ohlídal, Ivan
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Volume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5026195
Date:
May, 2018
File:
PDF, 2.12 MB
english, 2018
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