[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - A new method to manufacture parylene microcapillaries
Chou, Tzu-Chieh, Pi, Yudan, Xu, Han, Tai, Yu-ChongYear:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346789
File:
PDF, 538 KB
english, 2018