Combined processing of ellipsometric and photometric data to determine the optical constants and thicknesses of amorphous hydrogenated silicon layers
R. V. Aleshkin, S. M. Karabanov, D. I. PonomarevVolume:
61
Language:
english
Pages:
5
DOI:
10.1007/bf02606399
Date:
July, 1994
File:
PDF, 304 KB
english, 1994