Combined processing of ellipsometric and photometric data...

Combined processing of ellipsometric and photometric data to determine the optical constants and thicknesses of amorphous hydrogenated silicon layers

R. V. Aleshkin, S. M. Karabanov, D. I. Ponomarev
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Volume:
61
Language:
english
Pages:
5
DOI:
10.1007/bf02606399
Date:
July, 1994
File:
PDF, 304 KB
english, 1994
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