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Journal of Materials Science: Materials in Electronics 2018 / 5

Ellipsometry-based conductivity extraction in case of phosphorus doped polysilicon

Kemiha, A., Birouk, B., Raskin, J.-P.
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Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-018-9260-4
Date:
May, 2018
File:
PDF, 2.00 MB
english, 2018
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