Full three-dimensional morphology evolution of amorphous...

AIP Advances 2018 / 04 Vol. 8; Iss. 4

Full three-dimensional morphology evolution of amorphous thin films for atomic layer deposition

Jin, Lingpeng, Li, Yawei, Hu, Zhigao, Chu, Junhao
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Volume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5025008
Date:
April, 2018
File:
PDF, 1.25 MB
english, 2018
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