Side-wall spacer passivated sub- μ m Josephson junction fabrication process
Grönberg, Leif, Kiviranta, Mikko, Vesterinen, Visa, Lehtinen, Janne, Simbierowicz, Slawomir, Luomahaara, Juho, Prunnila, Mika, Hassel, JuhaVolume:
30
Language:
english
Journal:
Superconductor Science and Technology
DOI:
10.1088/1361-6668/aa9411
Date:
December, 2017
File:
PDF, 1.20 MB
english, 2017