[IEEE 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Moltrasio (2018.3.26-2018.3.29)] 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Simulation-based approach for fabrication of micro-shell resonators with controllable stiffness and mass distribution
Shiari, Behrouz, Nagourney, Tal, Singh, Sajal, Cho, Jae Yoong, Najafi, KhalilYear:
2018
Language:
english
DOI:
10.1109/ISISS.2018.8358146
File:
PDF, 747 KB
english, 2018