[IEEE 2018 IEEE International Symposium on Inertial Sensors...

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[IEEE 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Moltrasio (2018.3.26-2018.3.29)] 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Simulation-based approach for fabrication of micro-shell resonators with controllable stiffness and mass distribution

Shiari, Behrouz, Nagourney, Tal, Singh, Sajal, Cho, Jae Yoong, Najafi, Khalil
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Year:
2018
Language:
english
DOI:
10.1109/ISISS.2018.8358146
File:
PDF, 747 KB
english, 2018
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