[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Epitaxially-grown thick polysilicon for baw disk resonator gyroscopes with very low dissipation
Daruwalla, Anosh, Wen, Haoran, Mirjalili, Ramin, Ayazi, FarrokhYear:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346729
File:
PDF, 2.27 MB
english, 2018