Recent Progress in EUV Metal Oxide Photoresists

Recent Progress in EUV Metal Oxide Photoresists

Kasahara, Kazuki, Xu, Hong, Kosma, Vasiliki, Odent, Jeremy, Giannelis, Emmanuel P., Ober, Christopher K.
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Volume:
30
Year:
2017
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.30.93
File:
PDF, 4.54 MB
english, 2017
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