[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) -...

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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast, United Kingdom (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Acceleration insensitive hemispherical shell resonators using pop-up rings

Torunbalci, Mustafa Mert, Dai, Sen, Bhat, Ajay, Bhave, Sunil A.
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Year:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346716
File:
PDF, 2.13 MB
english, 2018
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