Excimer laser Annealing of Ion-implanted SiC and Suppression of Implantation-induced Damage by Simultaneous Excimer laser Irradiation During Ion Implantation.
HISHIDA, Yuji, KUDO, Jun, WATANABE, MasanoriVolume:
44
Year:
2001
Language:
english
Journal:
SHINKU
DOI:
10.3131/jvsj.44.451
File:
PDF, 585 KB
english, 2001