The influence of contact material on lateral wet-etching of...

Thin Solid Films 2018 / 08 Vol. 660

The influence of contact material on lateral wet-etching of nickel thin films in lamellae structure

Kim, Jeong Hwan, Jeong, Jik-Han, Lee, Seung-Hun, Kim, Kwanoh, Yoon, Jae Sung, Choi, Doo-Sun, Yoo, Yeong-Eun
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Volume:
660
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.05.039
Date:
August, 2018
File:
PDF, 1.94 MB
english, 2018
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