Magnet-free uniform sputtering of dielectric film by RF and...

Japanese Journal of Applied Physics 2016 / 08 Vol. 55; Iss. 8

Magnet-free uniform sputtering of dielectric film by RF and microwave power superposition

Sasai, Kensuke, Hagihara, Toshiya, Noda, Tomonori, Suzuki, Haruka, Toyoda, Hirotaka
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Volume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.086202
Date:
August, 2016
File:
PDF, 1.19 MB
english, 2016
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