The European Physical Journal D / Atomic, Molecular, Optical and Plasma Physics
2018 / 5 Vol. 72; Iss. 5
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Evaluation of oxygen species during E–H transition in inductively coupled RF plasmas: combination of experimental results with global model
Meichsner, Jürgen, Wegner, ThomasVolume:
72
Language:
english
Journal:
The European Physical Journal D
DOI:
10.1140/epjd/e2018-80720-0
Date:
May, 2018
File:
PDF, 2.80 MB
english, 2018