Mechanism of wiggling enhancement due to HBr gas addition...

Japanese Journal of Applied Physics 2015 / 06 Vol. 54; Iss. 6S1

Mechanism of wiggling enhancement due to HBr gas addition during amorphous carbon etching

Kofuji, Naoyuki, Ishimura, Hiroaki, Kobayashi, Hitoshi, Une, Satoshi
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Volume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.06FH04
Date:
June, 2015
File:
PDF, 2.84 MB
english, 2015
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