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Optical, Electrical, and Crystal Properties of TiO2 Thin Films Grown by Atomic Layer Deposition on Silicon and Glass Substrates
Kupa, I., Unal, Y., Cetin, S. S., Durna, L., Topalli, K., Okyay, A. K., Ates, H.Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-018-6370-y
Date:
May, 2018
File:
PDF, 1.32 MB
english, 2018