[IEEE 2018 IEEE International Reliability Physics Symposium (IRPS) - Burlingame, CA (2018.3.11-2018.3.15)] 2018 IEEE International Reliability Physics Symposium (IRPS) - Comprehensive device and product level reliability studies on advanced CMOS technologies featuring 7nm high-k metal gate FinFET transistors
Huang, D. S., Lee, J. H., Tsai, Y. S., Wang, Y. F., Huang, Y.S., Lin, C.K., Lu, Ryan, He, JunYear:
2018
Language:
english
DOI:
10.1109/IRPS.2018.8353651
File:
PDF, 388 KB
english, 2018