Large-Area, Single-Layer Molybdenum Disulfide Synthesized...

IEEE Electron Device Letters 2018 / 6 Vol. 39; Iss. 6

Large-Area, Single-Layer Molybdenum Disulfide Synthesized at BEOL Compatible Temperature as Cu Diffusion Barrier

Lo, Chun-Li, Zhang, Kehao, Scott Smith, Ryan, Shah, Ketan, Robinson, Joshua A., Chen, Zhihong
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Volume:
39
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2018.2827061
Date:
June, 2018
File:
PDF, 1.06 MB
english, 2018
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