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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators
Schaffer, Zachary A., Colombo, Luca, Kochhar, Abhay S., Piazza, Gianluca, Mishin, Sergey, Oshmyansky, YuryYear:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346673
File:
PDF, 1.20 MB
english, 2018