Microstructure and properties of aluminum contacts formed...

Journal of Electronic Materials 2001 Vol. 30; Iss. 8

Microstructure and properties of aluminum contacts formed on GaAs(100) by low pressure chemical vapor deposition with dimethylethylamine alane source

V. Shashkin, S. Rushworth, V. Danil'tsev, A. Murel, Yu. Drozdov, S. Gusev, O. Khrykin, N. Vostokov
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
30
Year:
2001
Language:
english
Pages:
7
DOI:
10.1007/bf02657721
File:
PDF, 866 KB
english, 2001
Conversion to is in progress
Conversion to is failed