ChemInform Abstract: Characterization of Oxide Growth at High Temperatures and Low Pressures from Silane/Nitrous Oxide Reaction.
LEARN, A. J., JACKSON, R. B.Volume:
17
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.198615034
Date:
April, 1986
File:
PDF, 119 KB
1986