ChemInform Abstract: Thin Film Properties of Sputtered...

ChemInform Abstract: Thin Film Properties of Sputtered Niobium Silicide on SiO 2 , Si 3 N 4 , and N+ Poly-Si.

CHOW, T. P., LU, W. J., STECKL, A. J., BALIGA, B. J.
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Volume:
17
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.198619329
Date:
May, 1986
File:
PDF, 212 KB
1986
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