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Growth and characterization of amorphous boron nitride dielectric films on Si via RF sputtering at room temperature
Abbas, Qasim, Liang, Hongwei, Shi, Jianjun, Chen, Yuanpeng, Xia, Xiaochuan, Ahmad, Aqrab ul, Liu, Jianxun, Du, GuotongVolume:
227
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2018.05.099
Date:
September, 2018
File:
PDF, 1.99 MB
english, 2018