Improvement of the accuracy of the In-situ ellipsometric...

Journal of Electronic Materials 2001 Vol. 30; Iss. 6

Improvement of the accuracy of the In-situ ellipsometric measurements of temperature and alloy composition for MBE grown HgCdTe LWIR/MWIR structures

M. Daraselia, J. W. Garland, B. Johs, V. Nathan, S. Sivananthan
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Volume:
30
Year:
2001
Language:
english
Pages:
6
DOI:
10.1007/bf02665848
File:
PDF, 143 KB
english, 2001
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