![](/img/cover-not-exists.png)
Cutting properties of deposited amorphous silicon in ultra-precision machining
Jelenkovic, Emil, To, Suet, Chen, Ling, XIAO, Gaobo, Zhao, Zejia, Tang, Chak-yinLanguage:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aac795
Date:
May, 2018
File:
PDF, 554 KB
english, 2018