[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity
Chen, Dongyang, Liu, Xinxin, Wang, Yong, Xu, Zhonggui, Lin, Hongyun, Liu, Huicong, Xie, JinYear:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346750
File:
PDF, 925 KB
english, 2018