[IEEE 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Granada (2018.3.19-2018.3.21)] 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Ferroelectric properties of HfO2 interlayers in SOI and SOS pseudo-MOSFETs
Popov, Vladimir, Ilnitsky, Mikhail, Antonov, Valentin, Vdovin, Vladimir, Tyschenko, Ida, Miakonkikh, Andrey, Rudenko, KonstantinYear:
2018
Language:
english
DOI:
10.1109/ULIS.2018.8354731
File:
PDF, 714 KB
english, 2018