Crystalline defect formation on aluminum bond pads during...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 05 Vol. 36; Iss. 3

Crystalline defect formation on aluminum bond pads during CMOS wafer storage and process strategies for defect elimination

Pani, Santosh Kumar, Hogan, Royston Hugh, Pandurangan, Madhavan, Nistala, Ramesh Rao
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5027149
Date:
May, 2018
File:
PDF, 1.67 MB
english, 2018
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