[IEEE 2018 XIV-th International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Lviv, Ukraine (2018.4.18-2018.4.22)] 2018 XIV-th International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Development of multi-probe connecting deviceson flexible polyimide base for MEMS components testing
Palagin, Victor, Razumov-Fryziuk, Ievgenii, Botsman, Iryna, Nevliudova, ViktoriyaYear:
2018
Language:
english
DOI:
10.1109/MEMSTECH.2018.8365740
File:
PDF, 1.50 MB
english, 2018