![](/img/cover-not-exists.png)
[ASME 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems - Clear Water Bay, Kowloon, Hong Kong (Tuesday 3 June 2008)] 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems - Design and Analysis of a Novel MEMS Variable Capacitor for RF Applications
Rao, Qing, Yao, Jun, Zhang, Li, Wang, Dajia, Yang, MohuaYear:
2008
Language:
english
DOI:
10.1115/MicroNano2008-70263
File:
PDF, 357 KB
english, 2008