Preparation of Boron Nitride Films by Reactive Sputtering

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Preparation of Boron Nitride Films by Reactive Sputtering

Mieno, Masahiro, Yoshida, Toyonobu, Akashi, Kazuo
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Volume:
52
Year:
1988
DOI:
10.2320/jinstmet1952.52.2_199
File:
PDF, 678 KB
1988
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