Cluster tool for in situ...

Analytical Chemistry 2018 / 05

Cluster tool for in situ processing and comprehensive characterization of thin films at high temperatures

Wenisch, Robert, Lungwitz, Frank, Hanf, Daniel, Heller, Rene, Zscharschuch, Jens, Hübner, René, von Borany, Johannes, Abrasonis, Gintautas, Gemming, Sibylle, Escobar-Galindo, Ramon, Krause, Matthias
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Language:
english
Journal:
Analytical Chemistry
DOI:
10.1021/acs.analchem.8b00923
Date:
May, 2018
File:
PDF, 7.97 MB
english, 2018
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