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Phase control and Young’s modulus of tungsten thin film prepared by dual ion beam sputtering deposition
Zhu, Fei, Xie, Zheng, Zhang, ZhengjunVolume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5021009
Date:
March, 2018
File:
PDF, 2.12 MB
english, 2018