Structure properties and electrical mechanisms of Si(001)/SiO 2 interface with varying Si layer thickness in nano-scale transistor
Li, Haixia, Ji, Aiming, Zhu, Canyan, Mao, Ling-FengVolume:
18
Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2018.05.010
Date:
September, 2018
File:
PDF, 1.76 MB
english, 2018