Study of dual nitridation processes in growth of non-polar a -plane AlGaN epi-layers
Zhao, Jianguo, Zhang, Xiong, Chen, Shuai, He, Jiaqi, Fan, Aijie, Wu, Zili, Wang, Shuchang, Liu, Yushen, Feng, Jinfu, Cui, YipingVolume:
227
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2018.05.055
Date:
September, 2018
File:
PDF, 1.62 MB
english, 2018