Development and characterization of thinned PZT bulk...

Microelectronic Engineering 2018 / 10 Vol. 197

Development and characterization of thinned PZT bulk technology based actuators devoted to a 6-DOF micropositioning platform

Benouhiba, Amine, Belharet, Djaffar, Bienaimé, Alex, Chalvet, Vincent, Rakotondrabe, Micky, Clévy, Cédric
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Volume:
197
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2018.05.007
Date:
October, 2018
File:
PDF, 1000 KB
english, 2018
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